![]() ![]() ![]() VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound O=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 20.238000005229 chemical vapour deposition Methods 0.000 description 20.-1 polynorbomenes Substances 0.000 description 22.238000000354 decomposition reaction Methods 0.000 description 24.238000005859 coupling reaction Methods 0.000 claims description 134.238000010168 coupling process Methods 0.000 claims description 134.238000004519 manufacturing process Methods 0.000 title abstract description 70.239000000523 sample Substances 0.000 title claims abstract description 240.230000003287 optical Effects 0.000 title claims abstract description 250.230000005693 optoelectronics Effects 0.000 title claims abstract description 338.Publication of US20040017215A1 publication Critical patent/US20040017215A1/en Assigned to DARPA reassignment DARPA CONFIRMATORY LICENSE Assignors: GEORGIA TECH RESEARCH CORPORATION Application granted granted Critical Publication of US7554347B2 publication Critical patent/US7554347B2/en Status Expired - Fee Related legal-status Critical Current Adjusted expiration legal-status Critical Links Assignors: MARTIN, KEVIN P., MEINDL, JAMES D., MULE, TONY, BAKIR, MUHANNAD, KOHL, PAUL, THACKER, HIREN, GAYLORD, THOMAS K. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority claimed from US36544302P external-priority Application filed by Georgia Tech Research Corp filed Critical Georgia Tech Research Corp Priority to US10/390,873 priority Critical patent/US7554347B2/en Assigned to GEORGIA TECH RESEARCH CORPORATION reassignment GEORGIA TECH RESEARCH CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Original Assignee Georgia Tech Research Corp Priority date (The priority date is an assumption and is not a legal conclusion. ![]() Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Martin Paul Kohl Current Assignee (The listed assignees may be inaccurate. ( en Inventor Tony Mule′ Hiren Thacker Muhannad Bakir James D. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Expired - Fee Related, expires Application number US10/390,873 Other versions US20040017215A1 Google Patents High input/output density optoelectronic probe card for wafer-level test of electrical and optical interconnect components, methods of fabrication, and methods of useĭownload PDF Info Publication number US7554347B2 US7554347B2 US10/390,873 US39087303A US7554347B2 US 7554347 B2 US7554347 B2 US 7554347B2 US 39087303 A US39087303 A US 39087303A US 7554347 B2 US7554347 B2 US 7554347B2 Authority US United States Prior art keywords optoelectronic probe card waveguide optical optical component Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US7554347B2 - High input/output density optoelectronic probe card for wafer-level test of electrical and optical interconnect components, methods of fabrication, and methods of use US7554347B2 - High input/output density optoelectronic probe card for wafer-level test of electrical and optical interconnect components, methods of fabrication, and methods of use ![]()
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